TY  - JOUR

T1  - An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/ oxygen plasmas

JO  - Journal of Materials Science

UR  - http://dx.doi.org/10.1007/bf00372203

PY  - 1996/04/01

AU  - Alexander MR

AU  - Short RD

AU  - Jones FR

AU  - Stollenwerk M

AU  - Zabold J

AU  - Michaeli W

ED  - 

DO  - DOI: 10.1007/bf00372203

PB  - Springer Science and Business Media LLC

VL  - 31

IS  - 7

SP  - 1879

EP  - 1885

Y2  - 2024/12/22

ER  -