@article{article, title  = {{Focused ion beam etching for the fabrication of micropillar microcavities made of III-V semiconductor materials}},

 publisher = {{American Vacuum Society}},

 url = {{}},

 year = {{2007}},

 month = {{7}},

 author = {{Ho Y-LD and Gibson R and Hu CY and Cryan MJ and Rarity JG and Heard PJ and Timpson JA and Fox AM and Skolnick MS and Hopkinson M and Tahraoui A}},

 doi = {{10.1116/1.2749528}},

 volume = {{25}},

 journal = {{Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures}},

 issue = {{4}},

 pages = {{1197-1197}},

 note = {{Accessed on 2025/03/11}}}