TY  - JOUR

T1  - Focused ion beam etching for the fabrication of micropillar microcavities made of III-V semiconductor materials

JO  - Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

PY  - 2007/07/01

AU  - Ho Y-LD

AU  - Gibson R

AU  - Hu CY

AU  - Cryan MJ

AU  - Rarity JG

AU  - Heard PJ

AU  - Timpson JA

AU  - Fox AM

AU  - Skolnick MS

AU  - Hopkinson M

AU  - Tahraoui A

ED  - 

DO  - DOI: 10.1116/1.2749528

PB  - American Vacuum Society

VL  - 25

IS  - 4

SP  - 1197

EP  - 1197

Y2  - 2025/03/13

ER  -