@article{article, title  = {{Recent improvements in quantification of energy-dispersive X-ray spectra and maps in electron microscopy of semiconductors}},

 url = {{}},

 year = {{2024}},

 month = {{1}},

 author = {{Walther T}},

 doi = {{10.1002/appl.202300128}},

 volume = {{3}},

 journal = {{Applied Research}},

 issue = {{4-5}},

 note = {{Accessed on 2024/10/23}}}