@article{article, title  = {{3D FIB and AFM mapping of Nanoindentation Zones}},

 publisher = {{Cambridge University Press (CUP)}},

 url = {{}},

 year = {{2001}},

 month = {{1}},

 author = {{Steer TJ and Möbus G and Kraft O and Wagner T and Inkson BJ}},

 doi = {{10.1557/proc-649-q3.7}},

 volume = {{649}},

 journal = {{MRS Proceedings}},

 note = {{Accessed on 2024/12/22}}}