@inproceedings{inproceedings, title = {{The determination of absorption parameters in Si and GaAs using energy filtered imaging}}, url = {{}}, year = {{1995}}, month = {{1}}, author = {{DuninBorkowski RE and Schaublin RE and Walther T and Boothroyd CB and Preston AR and Stobbs WM}}, volume = {{147}}, journal = {{ELECTRON MICROSCOPY AND ANALYSIS 1995}}, pages = {{179-182}}, note = {{Accessed on 2024/12/20}}}