TY  - JOUR

T1  - An Experimental and Analytical Study of an Asymmetric Capacitively Coupled Plasma Used for Plasma Polymerization

JO  - Plasma Processes and Polymers

UR  - http://dx.doi.org/10.1002/ppap.201400026

PY  - 2014/06/04

AU  - Michelmore A

AU  - Whittle JD

AU  - Short RD

AU  - Boswell RW

AU  - Charles C

ED  - 

DO  - DOI: 10.1002/ppap.201400026

PB  - Wiley

VL  - 11

IS  - 9

SP  - 833

EP  - 841

Y2  - 2024/12/22

ER  -