@inproceedings{inproceedings, title  = {{Application of spatially resolved electron energy-loss spectroscopy to the quantitative analysis of semiconducting layer structures}},

 url = {{}},

 year = {{1999}},

 month = {{1}},

 author = {{Walther T and Mader W}},

 journal = {{MICROSCOPY OF SEMICONDUCTING MATERIALS 1999, PROCEEDINGS}},

 issue = {{164}},

 pages = {{121-128}},

 note = {{Accessed on 2024/10/23}}}