TY  - CONF

T1  - Application of spatially resolved electron energy-loss spectroscopy to the quantitative analysis of semiconducting layer structures

JO  - MICROSCOPY OF SEMICONDUCTING MATERIALS 1999, PROCEEDINGS

PY  - 1999/01/01

AU  - Walther T

AU  - Mader W

ED  - Cullis AG

ED  - Beanland R

IS  - 164

SP  - 121

EP  - 128

Y2  - 2024/10/23

ER  -