@article{article, title = {{Resolution limits of secondary electron dopant contrast in helium ion and scanning electron microscopy.}}, url = {{}}, year = {{2011}}, month = {{7}}, author = {{Jepson M and Liu X and Bell D and Ferranti D and Inkson B and Rodenburg C}}, doi = {{10.1017/S1431927611000365}}, volume = {{17}}, journal = {{Microsc Microanal}}, issue = {{4}}, pages = {{637-642}}, note = {{Accessed on 2024/12/21}}}