TY  - JOUR

T1  - Resolution limits of secondary electron dopant contrast in helium ion and scanning electron microscopy.

JO  - Microsc Microanal

PY  - 2011/07/12

AU  - Jepson M

AU  - Liu X

AU  - Bell D

AU  - Ferranti D

AU  - Inkson B

AU  - Rodenburg C

ED  - 

DO  - DOI: 10.1017/S1431927611000365

VL  - 17

IS  - 4

SP  - 637

EP  - 642

Y2  - 2024/12/21

ER  -