@inproceedings{inproceedings, title = {{Experimental study of the impact of SO phonon scattering in high-κ gate dielectric MOSFETs}}, url = {{}}, year = {{2006}}, month = {{1}}, author = {{Atarah SA and De Souza MM and Peterson J and Bersuker G and Brown G}}, volume = {{3}}, journal = {{210th Transactions of the Electrochemical society}}, note = {{Accessed on 2024/12/20}}}