TY  - JOUR

T1  - A study of HMDSO/O2 plasma deposits using a high-sensitivity and -energy resolution XPS instrument: curve fitting of the Si 2p core level

JO  - Applied Surface Science

UR  - http://dx.doi.org/10.1016/s0169-4332(98)00479-6

PY  - 1999/01/01

AU  - Alexander MR

AU  - Short RD

AU  - Jones FR

AU  - Michaeli W

AU  - Blomfield CJ

ED  - 

DO  - DOI: 10.1016/s0169-4332(98)00479-6

PB  - Elsevier BV

VL  - 137

IS  - 1-4

SP  - 179

EP  - 183

Y2  - 2024/12/22

ER  -