@article{article, title = {{Molecular dynamics studies of the bonding properties of amorphous silicon nitride coatings on crystalline silicon}}, url = {{http://eprints.whiterose.ac.uk/74870/ }}, year = {{2011}}, month = {{1}}, author = {{Butler KT and Lamers MPWE and Weeber AW and Harding JH}}, doi = {{10.1063/1.3670068}}, volume = {{110}}, journal = {{JOURNAL OF APPLIED PHYSICS}}, issue = {{12}}, note = {{Accessed on 2024/12/22}}}