TY  - JOUR

T1  - Molecular dynamics studies of the bonding properties of amorphous silicon nitride coatings on crystalline silicon

JO  - JOURNAL OF APPLIED PHYSICS

UR  - http://eprints.whiterose.ac.uk/74870/

PY  - 2011/01/01

AU  - Butler KT

AU  - Lamers MPWE

AU  - Weeber AW

AU  - Harding JH

ED  - 

DO  - DOI: 10.1063/1.3670068

VL  - 110

IS  - 12

Y2  - 2024/12/22

ER  -