@article{article, title  = {{Effect of experimental parameters on doping contrast of Si p?n junctions in a FEG-SEM}},

 publisher = {{Elsevier BV}},

 url = {{http://dx.doi.org/10.1016/j.mee.2004.03.080 }},

 year = {{2004}},

 month = {{6}},

 author = {{KAZEMIAN P}},

 doi = {{10.1016/j.mee.2004.03.080}},

 volume = {{73-74}},

 journal = {{Microelectronic Engineering}},

 pages = {{948-953}},

 note = {{Accessed on 2024/12/21}}}