@article{article, title  = {{Low temperature a-Si:H TFTs with a SiO<inf>2</inf> gate insulator deposited by liquid phase deposition}},

 url = {{}},

 year = {{2011}},

 month = {{3}},

 author = {{Cross RBM and Oxley DP and Manhas M and Sankara Narayanan EM}},

 doi = {{10.1557/proc-808-a4.18}},

 volume = {{808}},

 journal = {{Materials Research Society Symposium Proceedings}},

 pages = {{697-702}},

 note = {{Accessed on 2024/10/23}}}