TY  - JOUR

T1  - Low temperature a-Si:H TFTs with a SiO<inf>2</inf> gate insulator deposited by liquid phase deposition

JO  - Materials Research Society Symposium Proceedings

PY  - 2011/03/21

AU  - Cross RBM

AU  - Oxley DP

AU  - Manhas M

AU  - Sankara Narayanan EM

ED  - 

DO  - DOI: 10.1557/proc-808-a4.18

VL  - 808

SP  - 697

EP  - 702

Y2  - 2024/12/20

ER  -