@inproceedings{inproceedings, title = {{Scattering distribution from semiconductors as a function of angle and energy loss in the electron microscope}}, url = {{}}, year = {{1997}}, month = {{1}}, author = {{Boothroyd CB and Dunin-Borkowski RE and Walther T}}, volume = {{466}}, journal = {{Materials Research Society Symposium - Proceedings}}, pages = {{113-118}}, note = {{Accessed on 2024/10/23}}}