@inproceedings{inproceedings, title  = {{Analysis Of Phosphorus Diffusion In the Polysilicon/Oxide/Silicon System Under Oxidizing Conditions For Profile Simulation}},

 url = {{}},

 year = {{1998}},

 month = {{11}},

 author = {{Gaiseanu F and Tsoukalas D and Tsamis C and Stoemenos J and Dimitriadis CA and Vasilaki E}},

 note = {{Accessed on 2024/12/22}}}