@inproceedings{inproceedings, title = {{The Effect of Oxidation and Carbon Contamination on SEM Dopant Contrast}}, url = {{}}, year = {{2010}}, month = {{1}}, author = {{Jepson MAE and Khan K and Hayward TJ and Inkson BJ and Rodenburg C}}, doi = {{10.1088/1742-6596/241/1/012078}}, volume = {{241}}, journal = {{ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2009 (EMAG 2009)}}, note = {{Accessed on 2024/12/21}}}