@inproceedings{inproceedings, title  = {{A new Gaussian process-based approach for uncertainty propagation in surface metrology profile parameters estimation}},

 url = {{}},

 year = {{2019}},

 month = {{1}},

 author = {{Obajemu O and Mahfouf M and McLeay TE and Jiang X and Scott PJ and Kadirkamanathan V}},

 journal = {{European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019}},

 pages = {{520-523}},

 note = {{Accessed on 2024/12/22}}}