@article{article, title  = {{Formation of F6V2 complexes in F-implanted Ge determined by x-ray absorption near edge structure spectroscopy}},

 url = {{}},

 year = {{2016}},

 month = {{10}},

 author = {{Sanson A and El Mubarek HAW and Gandy AS and De Salvador D and Napolitani E and Carnera A}},

 doi = {{10.1016/j.mssp.2016.10.007}},

 journal = {{Materials Science in Semiconductor Processing}},

 note = {{Accessed on 2024/12/22}}}