@article{article, title  = {{Defects in TiN and TiAIN coatings grown by combined cathodic arc/unbalanced magnetron technology}},

 publisher = {{Elsevier BV}},

 url = {{http://dx.doi.org/10.1016/0042-207x(94)e0029-x }},

 year = {{1995}},

 month = {{1}},

 author = {{Münz W-D and Lewis DB and Creasey S and Hurkmans T and Trinh T and Ijzendorn W}},

 doi = {{10.1016/0042-207x(94)e0029-x}},

 volume = {{46}},

 journal = {{Vacuum}},

 issue = {{4}},

 pages = {{323-330}},

 note = {{Accessed on 2024/12/21}}}