@inproceedings{inproceedings, title  = {{Energy Filtered Scanning Electron Microscopy: applications to characterisation of semiconductors}},

 url = {{}},

 year = {{2010}},

 month = {{1}},

 author = {{Rodenburg C and Jepson MAE and Inkson BJ and Bosch EGT and Humphreys CJ}},

 doi = {{10.1088/1742-6596/241/1/012074}},

 volume = {{241}},

 journal = {{ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2009 (EMAG 2009)}},

 note = {{Accessed on 2024/12/21}}}