TY  - JOUR

T1  - Energy selective scanning electron microscopy to reduce the effect of contamination layers on scanning electron microscope dopant mapping.

JO  - Ultramicroscopy

PY  - 2010/04/28

AU  - Rodenburg C

AU  - Jepson MAE

AU  - Bosch EGT

AU  - Dapor M

ED  - 

DO  - DOI: 10.1016/j.ultramic.2010.04.008

VL  - 110

IS  - 9

SP  - 1185

EP  - 1191

Y2  - 2024/12/21

ER  -