@article{article, title  = {{TEM studies of RF magnetron-sputtered thin films}},

 url = {{}},

 year = {{1992}},

 month = {{3}},

 author = {{Reaney IM and Barber DJ and Watton R}},

 doi = {{10.1007/BF00701095}},

 volume = {{3}},

 journal = {{Journal of Materials Science: Materials in Electronics}},

 issue = {{1}},

 pages = {{51-63}},

 note = {{Accessed on 2024/12/22}}}