TY  - JOUR

T1  - TEM studies of RF magnetron-sputtered thin films

JO  - Journal of Materials Science: Materials in Electronics

PY  - 1992/03/01

AU  - Reaney IM

AU  - Barber DJ

AU  - Watton R

ED  - 

DO  - DOI: 10.1007/BF00701095

VL  - 3

IS  - 1

SP  - 51

EP  - 63

Y2  - 2024/12/22

ER  -