TY  - JOUR

T1  - Nanoscale wafer patterning using SPM induced local anodic oxidation in InP substrates

JO  - Semiconductor Science and Technology

UR  - https://eprints.whiterose.ac.uk/182271/

PY  - 2022/02/01

AU  - Ovenden C

AU  - Farrer I

AU  - Skolnick MS

AU  - Heffernan J

ED  - 

DO  - DOI: 10.1088/1361-6641/ac3f20

PB  - IOP Publishing

VL  - 37

IS  - 2

Y2  - 2024/12/22

ER  -