@article{article, title  = {{Optimizing and quantifying dopant mapping using a scanning electron microscope with a through-the-lens detector}},

 url = {{}},

 year = {{2003}},

 month = {{7}},

 author = {{Schonjahn C and Broom RF and Humphreys CJ and Howie A and Mentink SAM}},

 doi = {{10.1063/1.1592302}},

 volume = {{83}},

 journal = {{APPL PHYS LETT}},

 issue = {{2}},

 pages = {{293-295}},

 note = {{Accessed on 2024/12/21}}}