TY  - JOUR

T1  - Optimizing and quantifying dopant mapping using a scanning electron microscope with a through-the-lens detector

JO  - APPL PHYS LETT

PY  - 2003/07/14

AU  - Schonjahn C

AU  - Broom RF

AU  - Humphreys CJ

AU  - Howie A

AU  - Mentink SAM

ED  - 

DO  - DOI: 10.1063/1.1592302

VL  - 83

IS  - 2

SP  - 293

EP  - 295

Y2  - 2024/12/21

ER  -