@article{article, title  = {{Pb(Zr,Ti)O3 thin films on zirconium membranes for micromechanical applications}},

 url = {{}},

 year = {{1996}},

 month = {{1}},

 author = {{Maeder T and Muralt P and Sagalowicz L and Reaney I and Kohli M and Kholkin A and Setter N}},

 doi = {{10.1063/1.116529}},

 volume = {{68}},

 journal = {{Applied Physics Letters}},

 issue = {{6}},

 pages = {{776-778}},

 note = {{Accessed on 2025/03/11}}}