@article{article, title  = {{A quantitative study of compositional profiles of chemical vapour-deposited strained silicon-germanium/silicon layers by transmission electron microscopy}},

 url = {{}},

 year = {{1999}},

 month = {{1}},

 author = {{Walther T and Humphreys CJ}},

 doi = {{10.1016/S0022-0248(98)00930-0}},

 volume = {{197}},

 journal = {{Journal of Crystal Growth}},

 issue = {{1-2}},

 pages = {{113-128}},

 note = {{Accessed on 2024/10/23}}}