@article{article, title  = {{Energy-filtered imaging in a field-emission scanning electron microscope for dopant mapping in semiconductors}},

 url = {{}},

 year = {{2002}},

 month = {{12}},

 author = {{Schonjahn C and Humphreys CJ and Glick M}},

 doi = {{10.1063/1.1525862}},

 volume = {{92}},

 journal = {{J APPL PHYS}},

 issue = {{12}},

 pages = {{7667-7671}},

 note = {{Accessed on 2024/12/21}}}