TY  - JOUR

T1  - Energy-filtered imaging in a field-emission scanning electron microscope for dopant mapping in semiconductors

JO  - J APPL PHYS

PY  - 2002/12/15

AU  - Schonjahn C

AU  - Humphreys CJ

AU  - Glick M

ED  - 

DO  - DOI: 10.1063/1.1525862

VL  - 92

IS  - 12

SP  - 7667

EP  - 7671

Y2  - 2024/12/21

ER  -