@article{article, title  = {{Influence of phosphorus and hydrogen ion implantation on the photoluminescence of SiO<inf>2</inf> with Si nanoinclusions}},

 url = {{}},

 year = {{2001}},

 month = {{1}},

 author = {{Tetelbaum DI and Trushin SA and Burdov VA and Golovanov AI and Revin DG and Gaponova DM}},

 doi = {{10.1016/S0168-583X(00)00457-2}},

 volume = {{174}},

 journal = {{Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms}},

 issue = {{1-2}},

 pages = {{123-129}},

 note = {{Accessed on 2024/12/20}}}