@article{article, title  = {{Transmission electron microscopy study of Si δ-doped GaAs/AlGaAs/InGaAs/GaAs pseudomorphic high electron mobility transistor structures}},

 url = {{}},

 year = {{1997}},

 month = {{10}},

 author = {{Molina SI and Walther T}},

 doi = {{10.1016/S0040-6090(97)00245-9}},

 volume = {{307}},

 journal = {{Thin Solid Films}},

 issue = {{1-2}},

 pages = {{6-9}},

 note = {{Accessed on 2024/12/20}}}