TY - JOUR T1 - Transmission electron microscopy study of Si δ-doped GaAs/AlGaAs/InGaAs/GaAs pseudomorphic high electron mobility transistor structures JO - Thin Solid Films PY - 1997/10/10 AU - Molina SI AU - Walther T ED - DO - DOI: 10.1016/S0040-6090(97)00245-9 VL - 307 IS - 1-2 SP - 6 EP - 9 Y2 - 2024/10/23 ER -