@article{article, title  = {{Capacitively and inductively coupled plasmas for mems applications}},

 url = {{}},

 year = {{2004}},

 month = {{1}},

 author = {{Lozano-Parada JH and Zimmerman WBJ}},

 volume = {{3}},

 journal = {{Proceedings of the 7th Biennial Conference on Engineering Systems Design and Analysis, ESDA 2004}},

 pages = {{545-551}},

 note = {{Accessed on 2024/12/22}}}