@inproceedings{inproceedings, title  = {{Chemistry and aging of organosiloxane and fluorocarbon films grown from hyperthermal polyatomic ions}},

 publisher = {{American Vacuum Society}},

 url = {{http://dx.doi.org/10.1116/1.1349723 }},

 year = {{2001}},

 month = {{7}},

 author = {{Hanley L and Fuoco E and Wijesundara MBJ and Beck AJ and Brookes PN and Short RD}},

 doi = {{10.1116/1.1349723}},

 volume = {{19}},

 journal = {{Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}},

 issue = {{4}},

 pages = {{1531-1536}},

 note = {{Accessed on 2024/12/22}}}