TY  - CONF

T1  - Novel, 100V, trench super junction high voltage TFTs using low temperature poly crystalline silicon

JO  - Technical Digest - International Electron Devices Meeting, IEDM

PY  - 2009/01/01

AU  - Dhyani MH

AU  - Green D

AU  - Sweet M

AU  - Narayanan EMS

AU  - Deane SC

AU  - Young ND

ED  - 

DO  - DOI: 10.1109/IEDM.2009.5424386

SN  - 9781424456406

Y2  - 2024/12/20

ER  -