@inproceedings{inproceedings, title  = {{Multilayered silicon silicon nitride thin films deposited by plasma-CVD: Effects of crystallization}},

 url = {{}},

 year = {{1995}},

 month = {{1}},

 author = {{Dutta J and Reaney IM and Cabarrocas PRI and Hofmann H}},

 volume = {{6}},

 journal = {{NANOSTRUCTURED MATERIALS}},

 issue = {{5-8}},

 pages = {{843-846}},

 note = {{Accessed on 2025/03/11}}}