@inproceedings{inproceedings, title  = {{Optimization of in situ substrate surface treatment in a cathodic arc plasma: A study by TEM and plasma diagnostics}},

 url = {{}},

 year = {{2001}},

 month = {{7}},

 author = {{Schonjahn C and Ehlasarian AP and Lewis DB and New R and Munz WD and Twesten RD and Petrov I}},

 volume = {{19}},

 journal = {{JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS}},

 issue = {{4}},

 pages = {{1415-1420}},

 note = {{Accessed on 2024/12/21}}}