@article{article, title  = {{Progress towards site-specific dopant profiling in the scanning electron microscope}},

 url = {{}},

 year = {{2010}},

 month = {{1}},

 author = {{Jepson MAE and Inkson BJ and Beanland R and Chee AKW and Humphreys CJ and Rodenburg C}},

 doi = {{10.1088/1742-6596/209/1/012068}},

 volume = {{209}},

 journal = {{Journal of Physics: Conference Series}},

 note = {{Accessed on 2024/12/21}}}