TY  - JOUR

T1  - Where physics meets chemistry: Thin film deposition from reactive plasmas

JO  - Frontiers of Chemical Science and Engineering

UR  - http://dx.doi.org/10.1007/s11705-016-1598-7

PY  - 2016/12/23

AU  - Michelmore A

AU  - Whittle JD

AU  - Bradley JW

AU  - Short RD

ED  - 

DO  - DOI: 10.1007/s11705-016-1598-7

PB  - Springer Science and Business Media LLC

VL  - 10

IS  - 4

SP  - 441

EP  - 458

Y2  - 2024/12/22

ER  -