@article{article, title = {{The impact of non-uniform channel layer growth on device characteristics in state of the Art Si/SiGe/Si p-metal oxide semiconductor field effect transistors}}, url = {{}}, year = {{2006}}, month = {{2}}, author = {{Chang ACK and Ross IM and Norris DJ and Cullis AG and Tang YT and Cerrina C and Evans AGR}}, doi = {{10.1016/j.tsf.2005.08.364}}, volume = {{496}}, journal = {{THIN SOLID FILMS}}, issue = {{2}}, pages = {{306-310}}, note = {{Accessed on 2024/12/21}}}