@article{article, title  = {{TEM analysis of Ge-on-Si MOSFET structures with HfO<inf>2</inf> dielectric for high performance PMOS device technology}},

 url = {{}},

 year = {{2010}},

 month = {{1}},

 author = {{Norris DJ and Walther T and Cullis AG and Myronov M and Dobbie A and Whall T and Parker EHC and Leadley DR and De Jaeger B and Lee W and Meuris M et al}},

 doi = {{10.1088/1742-6596/209/1/012061}},

 volume = {{209}},

 journal = {{Journal of Physics: Conference Series}},

 note = {{Accessed on 2024/12/20}}}