@article{article, title  = {{High resolution quantitative two-dimensional dopant mapping using energy-filtered secondary electron imaging}},

 url = {{}},

 year = {{2006}},

 month = {{9}},

 author = {{Kazemian P and Mentink SAM and Rodenburg C and Humphreys CJ}},

 doi = {{10.1063/1.2335980}},

 volume = {{100}},

 journal = {{J APPL PHYS}},

 issue = {{5}},

 note = {{Accessed on 2024/12/21}}}