TY  - JOUR

T1  - High resolution quantitative two-dimensional dopant mapping using energy-filtered secondary electron imaging

JO  - J APPL PHYS

PY  - 2006/09/01

AU  - Kazemian P

AU  - Mentink SAM

AU  - Rodenburg C

AU  - Humphreys CJ

ED  - 

DO  - DOI: 10.1063/1.2335980

VL  - 100

IS  - 5

Y2  - 2024/12/21

ER  -