@article{article, title  = {{Mass Spectral Investigation of the Radio-Frequency Plasma Deposition of Hexamethyldisiloxane}},

 publisher = {{American Chemical Society (ACS)}},

 url = {{http://dx.doi.org/10.1021/jp970663b }},

 year = {{1997}},

 month = {{5}},

 author = {{Alexander MR and Jones FR and Short RD}},

 doi = {{10.1021/jp970663b}},

 volume = {{101}},

 journal = {{The Journal of Physical Chemistry B}},

 issue = {{18}},

 pages = {{3614-3619}},

 note = {{Accessed on 2024/12/22}}}